JPH074599Y2 - シ−ト型誘電率測定用センサ− - Google Patents
シ−ト型誘電率測定用センサ−Info
- Publication number
- JPH074599Y2 JPH074599Y2 JP1987063051U JP6305187U JPH074599Y2 JP H074599 Y2 JPH074599 Y2 JP H074599Y2 JP 1987063051 U JP1987063051 U JP 1987063051U JP 6305187 U JP6305187 U JP 6305187U JP H074599 Y2 JPH074599 Y2 JP H074599Y2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric constant
- substance
- measurement
- measured
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title claims description 36
- 239000000126 substance Substances 0.000 claims description 29
- 239000010409 thin film Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 19
- 239000013076 target substance Substances 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 7
- 239000003921 oil Substances 0.000 description 14
- 235000019198 oils Nutrition 0.000 description 14
- 230000008859 change Effects 0.000 description 7
- 239000010408 film Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 235000014593 oils and fats Nutrition 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010775 animal oil Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 235000015112 vegetable and seed oil Nutrition 0.000 description 1
- 239000008158 vegetable oil Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987063051U JPH074599Y2 (ja) | 1987-04-25 | 1987-04-25 | シ−ト型誘電率測定用センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987063051U JPH074599Y2 (ja) | 1987-04-25 | 1987-04-25 | シ−ト型誘電率測定用センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189375U JPH0189375U (en]) | 1989-06-13 |
| JPH074599Y2 true JPH074599Y2 (ja) | 1995-02-01 |
Family
ID=31288584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987063051U Expired - Lifetime JPH074599Y2 (ja) | 1987-04-25 | 1987-04-25 | シ−ト型誘電率測定用センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH074599Y2 (en]) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112005000168T5 (de) * | 2004-01-13 | 2006-11-30 | Mitsui Mining & Smelting Co., Ltd. | Verfahren zur Herstellung eines Kunstharzformgehäuses, Alkoholkonzentrationssensor und Vorrichtung zum Messen einer Alkoholkonzentration |
| JP4821560B2 (ja) * | 2006-10-27 | 2011-11-24 | 株式会社デンソー | 液体性状センサ |
| JP4967673B2 (ja) * | 2007-01-16 | 2012-07-04 | パナソニック株式会社 | 電気機器の液体容器 |
| AU2011302422B2 (en) * | 2010-09-14 | 2014-08-07 | 3M Innovative Properties Company | Methods and devices for acquiring an oil sample and monitoring the quality thereof |
| CN108051645B (zh) * | 2017-12-26 | 2023-10-27 | 宁夏钜晶源晶体科技有限公司 | 一种钽酸锂、铌酸锂晶片电阻率测试装置及测试方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6018768A (ja) * | 1983-07-12 | 1985-01-30 | Katsuo Ebara | 非接触式電導率、誘電率同時測定センサ |
| JPS6050445A (ja) * | 1983-08-31 | 1985-03-20 | マジヤール ツドマニヨス アカデミア ケズポンテイ ヒバタラ | 容量性測定素子 |
| JPS60169719A (ja) * | 1984-02-14 | 1985-09-03 | Nippon Soken Inc | 物理量検出装置 |
-
1987
- 1987-04-25 JP JP1987063051U patent/JPH074599Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0189375U (en]) | 1989-06-13 |
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